Fabricating a MEMS Pressure Sensor - You Can Do This!

Explore the process of fabricating a MEMS pressure sensor in this comprehensive 1-hour 21-minute conference talk from the NACK - Nano-Educators Topical Seminar Series. Learn about the importance of MEMS pressure sensors, their applications, and how they work. Follow a detailed step-by-step walkthrough of the fabrication process, including photolithography, wafer preparation, deposition, etching, and inspection techniques. Discover the intricacies of backside and frontside patterning, sputtering, liftoff processes, and chamber etching. Gain insights into the use of specialized equipment like the Karl Suss MA6/BA6 and profilometer. The presentation also covers singulation, dicing, and probing of the finished sensors. Additionally, learn about undergraduate research opportunities and the MNTESIG community for those interested in pursuing this field further.

Fabricating a MEMS Pressure Sensor – You Can Do This!
What are MEMS Pressure Sensors?
Why do we care?
Who Makes These?
Pressure Sensor Application
A Cool App for your phone Check out your pressure sensor!
Pressure Sensor How it Works
MTTC Pressure Sensor Process Overview
SCME/MTTC Pressure Sensor Process - Video
Backside Pattern Chamber – Hard Mask
Photolithography
Wafer Prep Deposition
Wafer Prep QDR/SRD Deposition
Coat
Expose
Develop
Microscope Inspection
Profilometer Inspection - DekTak
After Pattern, Before RIE Etch – Profiles
Program
After first 5min
After Etch before Resist Strip
Etch Inspect
Selectivity: What you want etched Vs Masking Material
Backside is now etched
Frontside Pattern – Dark or Bright Field?
Karl Suss MA6/BA6
Backside Alignment Microscopes
Pattern the Wheatstone Bridge
Alignment Details
Photolithography – Liftoff LOR5B
LOR5b Results - Inspect
Photolithography – Liftoff nLOF2070
nLOF2070 Results
So Far....
Sputter – CrAu or NiCr
Load
Load Wafer in Load Lock
Sputter Wafer Stage and Target
Select
Metal on Photoresist
Liftoff
Inspect
What's Next?
Chamber Etch – Anisotropic Wet Etching of Silicon in KOH!
Singulation
Dicing
Probe
• • • • WWW.SCME-SUPPORT.ORG
NEW: URE - UNDERGRADUATE RESEARCH EXPERIENCE TARGETING 2YR TECHNICIAN STUDENTS WITH THEIR FACULTY!
MNTESIG COMMUNITY
Want to Give it a shot?
QUESTIONS?