Acquiring Quality SEM/FESEM Images in Different Situations - Like Driving a Car

Explore a comprehensive 52-minute webinar that simplifies the complex process of acquiring high-quality SEM/FESEM images by drawing analogies to everyday activities like driving a car. Learn about key imaging parameters, working distance, detector choices, beam voltage selection, and electron-sample interactions. Discover techniques for achieving sharp beams, correcting stigmation, and aligning apertures. Gain insights into various SEM/FESEM instruments and their capabilities, including the Merlin, G500, and Ultra models. Benefit from practical examples using diverse samples such as springtail cuticles, etched Si structures, and 2D materials. Enhance your understanding of SEM/FESEM imaging to improve your microscopy skills and obtain better results in different imaging situations.

Like driving a car: acquiring quality SEM/FESEM images in different situations
About me
Dalian
Outline
Springtail cuticles Sample curtesy: Lin Wang
Etched Si mushroom structure Sample curtesy: Lin Wang
Slide 7: Untitled
Etched Si grating Sample curtesy: Fabin Grise
WSe2/Graphene 0.2KV
MoS2/0.2KV Sample curtsey: Kevin Lu
3D printed nanostructure/2 kV Sample curtsey: Jiho Noh
Charging effect
Polystyrene latex coated with Au
Untitled: Slide 14
SE2 1KV/7.1mm
Outline
Key imaging parameters
Working Distance WD Smaller WD, better resolution
Working distance & detectors
Choice of detectors
Untitled: Slide 21
Choice of beam voltage
Electron and sample interaction
Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
Zeiss: Low-voltage SEM-beyond sample topography Dr. Iwona Jozwik
WSe2/0.5 kV
Block Copolymer Sample Curtesy: Karthik Arunagiri
20% Ce on Al2O3 particle
X-ray emission & EDS
Device EDS Mapping
Outline
Merlin
G500
G500: Excellent resolution at low KV
GEMINI I column G500
GEMINI II column Merlin
Ultra
Outline
A simplified ray diagram of SEM
Scanning-move the beam!
Magnification?
Merlin: Large field of view
Ideal beam?
Electron beam is a probe, just like your pencil
Tip size matters!
Tip shape matters too!
How does the beam shape affect SEM image?
Ideal beam?
How to achieve sharp beam on FESEM?
- focus
Which component control beam shape?
- Stigmation/stigmatism
Mechanism to correct stigmation Stigmators x/y
Ray diagram of a stigmated lens
under
How to correct stigmation
How to test when stigmation is corrected?
- stigmation
Why straight beam?
What happens when aperture is off?
How do you know when aperture is off?
- x/y alignment
5 controls needed to correct the beam
Questions?
The Nanofabrication Lab