Stanford Webinar - IOT: From Smart Sensors to Smart Networks

Explore the world of Internet of Things (IoT) and smart sensors in this Stanford webinar. Delve into the crucial role sensors play in IoT, examining various types including MEMS gyroscopes, atomic force microscopy, and laser scanners. Understand the inner workings of sensors, focusing on capacitive measurement of displacement and silicon micromechanical devices. Learn about MEMS materials, anisotropic etching of silicon, and bulk micromachined sensors. Discover advanced fabrication techniques like Deep Reactive Ion Etching (DRIE) and hydrogen annealing. Examine the challenges of integrating smart sensors with electronics and explore potential solutions such as MEMS phased arrays. Investigate the applications of wearable, ingestible, and implantable sensors in autonomous vehicles and other cutting-edge technologies. Gain insights into how awareness through smart sensors contributes to efficiency, safety, and sustainability in the IoT landscape.

Introduction.
From Smart Sensors to Smart Networks: How MEMS sensors enable the Internet of Things.
Outline.
Role of sensors in loT.
Sensors you use.
Timing Circuit.
MEMS Gyroscope Chip.
Atomic Force Microscopy - Sensing on the nanoscale.
Laser Scanner.
Texas Instruments Digital Light Processing (DLP) Technology.
Grating Light Valve - Silicon Light Machines.
How does sensors work?.
Capacitive measurement of displacement.
Small is beautiful.
Silicon Micromechanical Devices.
MEMS Materials.
Si Diamond structure.
Anisotropic Etching of Silicon.
Bulk Micromachined Sensors.
Micromachining Ink Jet Nozzles.
Electrostatic Combdrive Actuator.
Deep Reactive lon Etching (DRIE) Deposit polymer.
2x2 switch - DRIE of SOI.
Fiber AFM Fabrication.
Hydrogen Annealing.
Before Hydrogen Anneal.
After Hydrogen Anneal.
Simplified fabrication.
Conundrum - Smart Sensors MEMS and Electronics Integration.
Autonomous vehicles.
Awareness - Random Access Scanning.
Possible solution - MEMS Phased Arrays.
Wearable, Ingestible and Implantable Sensors.
What are the opportunities? What are the cool applications? • Awareness = Efficiency, safety, sustainability!.