Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13
Offered By: nanohubtechtalks via YouTube
Course Description
Overview
Syllabus
Nano-Characterization and Nano-Fabrication using EB/IB tools
Table of Contents
Introduction to "Nano-World"
Nano/Micro/Macro World
Brief History of Characterization with Microscopes
Nano-Characterization
Nano-Fabrication
Semiconductor History
MOSFET Scaling
Optical Lithography
Optical Lithography
DUV and EUV Lithography
Photon-Based Lithography
Photon-Based Lithography
Lithography for Nano-Fabrication
Lithography for Nano-Fabrication
Electron Beam Lithography
Inside an IBM Quantum Chip
Photons and Electrons
Electron Beam Lithography
EBL Process
EBL Post Processing Pattern Transfer
COP/PMMA DL Lift-Off Process
Resolution Pattern
Resolution Test Results
Resolution Test Results: Lift-Off
EBL Post Processing Pattern Transfer
Zep REI Etch Process
Resolution Test Results: RIE Etch
EBL in Research Environment
EBL in Research Environment
Nano-Fabrication in Research Environment
Lithography for Nano-Fabrication
FIB/SEM
Electrons and Ga+ Ions
In-Solid Interaction
What can IB Do?
Examples: Fabrication of Plasmonic Antennas
EBL and IBL
EBL and IBL
Example 1: AFM Probe Modification
Example 2: Metal Tip Modification
Example 3: Cutting out a Slab with a Specific Crystallographic Orientation
FIB FIB-FESEM
FIB as Characterization Tool
Demo
Taught by
nanohubtechtalks
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