Nano-Characterization and Nano-Fabrication Using Electron Beam and Ion Beam Tools - Lecture 13

Explore nano-characterization and nano-fabrication techniques using electron beam (EB) and ion beam (IB) tools in this comprehensive lecture by Tomoko Borsa from the University of Colorado, Boulder. Delve into the nano-world, tracing the history of microscopy and semiconductor technology. Examine various lithography methods, including optical, electron beam, and focused ion beam lithography. Learn about the processes, applications, and limitations of these techniques in research environments. Discover practical examples of EB and IB applications, such as AFM probe modification, metal tip alteration, and precise sample preparation. Gain insights into the use of focused ion beam as both a fabrication and characterization tool, concluding with a demonstration of these cutting-edge technologies.

Nano-Characterization and Nano-Fabrication using EB/IB tools
Table of Contents
Introduction to "Nano-World"
Nano/Micro/Macro World
Brief History of Characterization with Microscopes
Nano-Characterization
Nano-Fabrication
Semiconductor History
MOSFET Scaling
Optical Lithography
Optical Lithography
DUV and EUV Lithography
Photon-Based Lithography
Photon-Based Lithography
Lithography for Nano-Fabrication
Lithography for Nano-Fabrication
Electron Beam Lithography
Inside an IBM Quantum Chip
Photons and Electrons
Electron Beam Lithography
EBL Process
EBL Post Processing Pattern Transfer
COP/PMMA DL Lift-Off Process
Resolution Pattern
Resolution Test Results
Resolution Test Results: Lift-Off
EBL Post Processing Pattern Transfer
Zep REI Etch Process
Resolution Test Results: RIE Etch
EBL in Research Environment
EBL in Research Environment
Nano-Fabrication in Research Environment
Lithography for Nano-Fabrication
FIB/SEM
Electrons and Ga+ Ions
In-Solid Interaction
What can IB Do?
Examples: Fabrication of Plasmonic Antennas
EBL and IBL
EBL and IBL
Example 1: AFM Probe Modification
Example 2: Metal Tip Modification
Example 3: Cutting out a Slab with a Specific Crystallographic Orientation
FIB FIB-FESEM
FIB as Characterization Tool
Demo