Ion Implantation, Thermal Oxidation, and Atomic Layer Deposition - Lecture 7

Explore a comprehensive seminar on advanced semiconductor fabrication techniques in this nearly two-hour presentation from the NACK - Nano-Educators Topical Seminar Series. Delve into the intricacies of ion implantation, thermal oxidation, and atomic layer deposition (ALD) with experts Atilla Ozgur Cakmak from Pennsylvania State University and Rich Hill from Erie Community College. Learn about ion implantation processes, energy loss mechanisms, and crystal damage, with demonstrations of SRIM and TRIM simulations. Examine thermal oxidation, including oxide growth mechanisms, structure, and applications, complemented by interactive simulations. Investigate ALD techniques, comparing them to other deposition methods and exploring real-world applications through lab demonstrations. Gain insights into ALD capabilities at Penn State, featuring various tools and processes. Enhance your understanding of these crucial nanotechnology fabrication methods through detailed explanations, simulations, and practical demonstrations.

Ion Implantation, Thermal Oxidation and Atomic Layer Deposition
Ion Implantation
Implanting the Ions
Solid State Diffusion
Implanting the Ions
Implanting the Ions
An Ion Implanter
An Ion Implanter
An Ion Implanter
In Implantation Energy Loss Mechanisms
In Implantation Energy Loss Mechanisms
In Implantation Energy Loss Mechanisms
In Implantation Energy Loss Mechanisms
SRIM demo
TRIM demo
In Implantation Energy Loss Mechanisms
Channeling
Channeling
Crystal Damage
Crystal Damage
Crystal Damage
Crystal Damage
Crystal Damage
Ion Implant Lab
Ion Implant Lab
Ion Implant Lab
Ion Implantation Simulation Demo
Ion Implant Lab
Thermal Oxidation
Definitions
Uses of Oxides
Uses of Oxides
Uses of Oxides
Uses of Oxides
Uses of Oxides
Uses of Oxides
Oxide Structure
Oxide Structure
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Simulation Demo
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Simulation Demo
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Oxide Growth Mechanisms
Thickness of the oxide
Quantum Tunneling Simulation Demo
MOSCap Demo
Thickness of the oxide
Thickness of the oxide
Thickness of the oxide
Thickness of the oxide
Thickness of the oxide
Thickness of the oxide
Oxide non-idealities
Oxide non-idealities
Fundamentals
Fundamentals
ALD of Alumina
ALD of Alumina
ALD of Alumina
ALD of Alumina
ALD vs. Others
ALD vs. Others
ALD Lab
ALD Lab
ALD Lab
ALD Lab
ALD Lab
Ellipsometer Simulation Demo
ALD Lab
ALD Lab
ALD Lab
ALD Demo
1 ALD Capabilities at Penn State
1 4 ALD, tools: 2 thermal & 2 plasma
1 Thickness measurement and mapping
1 ALD processes on Lesker LE
107:15 Comparison between different systems
1 Ellipsometer Demo