Chemical Vapor Deposition: 2D Thin Films and 1D Nanowires - Lecture 6

Explore the fundamentals of Chemical Vapor Deposition (CVD) in this comprehensive 1.5-hour lecture from the NACK - Nano-Educators Topical Seminar Series. Delve into Low Pressure CVD (LPCVD), typical deposition system designs, and the two modes of deposition: thin films (2D nanoscale materials) and nanowires (1D nanoscale materials). Learn about LPCVD reactors, automation processes, and the intricacies of Vapor Solid (VS) and Vapor-Liquid-Solid (VLS) growth mechanisms. Discover the advantages and disadvantages of VS LPCVD thin films, catalyst selection for VLS growth, and potential applications such as silicon nanowires for bio-scaffolding. Gain insights into surface reactions, growth sequences, and rate-limiting steps in nanomaterial synthesis through this in-depth presentation by Terry Kuzma from Pennsylvania State University.

Chemical Vapor Deposition 2 Modes, 1D, 2D
Outline
Introduction
LPCVD
Outline
Form and Function
LPCVD Reactor
Batch LPCVD Horizontal Reactor
Automate Low Pressure Chemical Vapor Deposition
Automate LPCVD
Screen Capture of the Automate LPCVD Control Screen
Outline
Vapor Solid VS Growth
Thin Film Growth Sequence
What happens on the deposition surface?
Six Steps in VS Growth
Six Steps in VS Growth
Rate-Limiting Steps in VS Growth
Rate-Limiting Steps in VS Growth
Defects in VS Growth
Surface Reactions
Surface Reactions
VS Growth
VS Growth
VS LPCVD Thin Films Advantages
VS LPCVD Thin Films Disadvantages
Outline
Vapor-Liquid-Solid VLS Growth
Requirements for VLS Growth on a Crystalline Substrate
An Example: Silicon Nanowires Produced by Chemical Vapor Growth Using the Vapor-Liquid-Solid VLS Mechanism
VLS Growth
Deposition methods for catalysts
How Do You Choose a Catalyst for VLS Growth?
LPCVD Grown SiNWs
Silicon Nanowire as Bio-scaffolding
Silicon Nanowire as Bio-scaffolding
Any Questions?