Vacuum Function, Operation and Systems in Nanoscale Manufacturing - NACK S02

Explore the fundamentals of vacuum technology in advanced manufacturing and material characterization through this comprehensive 1 hour 39 minute lecture. Delve into core concepts including vacuum definition, quantification, and the impact of mean free path on nanoscale material deposition. Examine vacuum system design and pump physics, leading to a demonstration of a vacuum-based deposition tool. Learn about various vacuum ranges, mechanical pumps, and their applications in thermal evaporation, reactive ion etching, PECVD, and sputtering. Understand the significance of mean free path in vacuum systems and its practical implications through examples and problem-solving.

Vacuum Function, Operation and Systems
Outline
Why is vacuum technology important?
Vacuum
Properties of Gases
Theory of Pressure
Atmospheric Pressure
Atmospheric Properties
Vacuum Ranges
Vacuum Ranges
Mean Free Path MFP
MFP and Molecular Density Versus Pressure
MFP and Molecular Density
Thermal Evaporator
System Design
MFP and System design
Outline
Vacuum Pumps
Typical Ranges for Vacuum pumps
Mechanical Pumps
Mechanical Pumps
Mechanical Pump System
Thermal Evaporator
Reactive Ion Etch
PECVD
Sputtering Tool
Mean Free Path
Problem with a Short Mean Free Path?
Mean Free Path
Example