A brief introduction of Micro - Sensors

Main objective of this course is to introduce students to micro- and nano-scale devices. After successfully completing this short course, students will have an idea about MEMS and NEMS devices and their applications. They will know how to design, analyze and characterize a micro or nano system. They will also have an idea about MEMS fabrication.INTENDED AUDIENCE : Interested audiencePRE- REQUISITES : Basic Physics, Electronics and MechanicsSUPPORT INDUSTRY : TSMC, ASML, Sandisk, Applied Materials etc. semiconductor and process technology based companies

Week 1 : What is small! From millimeter to angstrom; MEMS sensors introduction and applicationWeek 2 :Fundamentals of stress-strain, electrostatics and energy dissipationWeek 3 : Si and its properties; Microfabrication and lithographyWeek 4 : Design and analysis of Micro Sensors; Case study: Accelerometer, Pressure sensor