Vacuum Systems and Technology

Vacuum technology is key to our high-tech society. It is is used for a large number of technical processes and products, including computer chips, nanostructures, microelectronic coatings and components as well as chemical and biological techniques.

In this engineering course, you will get a comprehensive overview of the construction and working principles of vacuum devices and systems to help you better design materials and processes .

Section 1. Vacuum theory

• Vacuum application. Introducing on molecular-kinetic theory of gases
• Molecular-kinetic theory of gases
• Sorption phenomena in vacuum
• Condensation and evaporation
• Physical processes in vacuum

Section 2. Mechanical means of obtaining a vacuum

• Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 1
• Mechanical vacuum pumps of preliminary vacuum. Construction, working principles and characteristics. Part 2
• Turbine and diffusion pumps. Construction, working principles and characteristics
• Ejector pump. Vacuum traps. Construction, working principles and characteristics

Section 3. Physical-chemical means of obtaining a vacuum

• Ion and ion-getter pumps. Construction, working principles and characteristics
• Sublimation and sputter ion pumps. Construction, working principle, characteristics
• Sorption and condensation pumps. Construction, working principles and characteristics

Section 4. Methods of pressure measurement

• Methods of total pressure measurement. Aneroid and hydrostatic vacuum gauges
• Methods of total pressure measurement. Thermal vacuum gauges
• Methods of total pressure measurement. Ionization vacuum gauges
• Methods of partial pressure measurement. Type of analyzers and traps
• Methods of partial pressure measurement. Mass-spectrometers

Section 5. Constructional elements of vacuum systems

• Valves and gates. Construction, working principle
• Leek valves. Construction, working principle
• Vacuum feedthroughs
• Methods of leak detection

Section 6. Construction principles of vacuum systems

• Calculation of vacuum systems to select of vacuum pumps
• Vacuum systems with diffusion and turbine pumps
• Vacuum systems with ion and condensation pumps
• Type of sealing